Batteries, Vol. seven, Pages 65: Effect associated with the Etching Profile of a Si Substrate in the Capacitive Characteristics of Three-Dimensional Solid-State Lithium-Ion Batteries
Batteries doi: 10. 3390/batteries7040065
Authors: Sergei Kurbatov Alexander Mironenko Victor Naumov Alexander Skundin Alexander Rudy
Along with the soaring demands for all-solid-state thin-film lithium-ion batteries, the problem of their energy density rise becomes very severe. The solution to this problem can be found inside advancement 3D batteries. The particular present work deals along with the development of a technology for a 3D solid-state lithium-ion battery (3D SSLIB) manufacturing by plasma-chemical etching and magnetron sputtering technique. The outcomes on screening of experimental samples associated with 3D SSLIB are presented. It was found that submicron-scale steps appearing at first glance of a 3D structure formed on Si base by Bosch process substantially replace the crystal structure associated with the upper functional levels. Such changes can business lead to disruption of the particular layers’ continuity, especially that will of the down conductors. It is shown that will surface polishing by water etching of the SiO2 layer and silicon reoxidation results in surface smoothing, the particular replacing the dendrite structure of functional layers by a block structure, plus a significant improvement inside the capacitive characteristics from the battery.